生体高分子研究

抽象的な

Stopping and Range of Ions in Matter data of polymeric materials simulating the process of ion implantation in plasma immersion

Péricles Lopes Sant’Ana

This work introduces the physico-chemical surface properties of three commercial polymers: white polyvinyl chloride (PVC), polyethylene terephthalate (PET) from two- liter bottles, and low-density polyethylene (LDPE) as results of plasma immersion ion implantation (PIII) using SF6 and N2 plasmas at low-pressure vacuum system. The experiments were conducted in the Technological Plasmas Laboratory (LapTec) between 2011 and 2013. For comparison, SRIM/TRIM calculations/Monte Carlo code were used to access the following output data: ion range and distribution (screening a Gaussian histogram); number of backscattered ions nB; and vacancies produced nVaccording to Kinchin–Pease formalism. In both approaches (experimental andsimulated), it was used as inputting data: the main ion implantation parameter: -1000 Vof high-voltage negative pulses in PIII experiments which are matched to 1 keV of inputenergy data in the virtual SRIM environment using F+ and N+ as projectiles ions, and rigid PVC, PET mylar and LDPE marlex as targets. The purpose was to link the surfaceproperties of the polymeric samples obtained in laboratory by PIII technique: Ɵ; Ɵ(t); R(z); T(λ) and B (by WVTR) with the output data about ion ranges and distribution, provided by the SRIM simulation.